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Scia Systems GmbH
Annaberger Str. 240
Chemnitz, 09125 GERMANY
phone: +49 371 5347 780
fax: +49 371 5347 781

Booth 37

scia Systems is a full range supplier of advanced ion beam and plasma processing equipment. The systems are applicable for coating and etching processes in the production of microelectronics, MEMS and precision optical components, in both, high volume production as well as research and development environments. Due to their flexible and modular design, the systems can be configured according to customer specific requirements. Amongst others by combining several vacuum process chambers into cluster or in-line solutions. Together with our worldwide service partners, we offer comprehensive service and superior technology support. Technology Portfolio: Ion Beam Trimming (IBT) • Ion Beam Etching and Milling (IBE/IBM • Dual Ion Beam Deposition (DIBD) • Plasma Enhanced Chemical Vapor Deposition (PECVD) • Reactive Ion Etching (RIE) • Magnetron Sputtering • Plasma Cleaning

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